Karl suss manual
· Karl Suss MA6 Mask Aligner. Figure 1: MA6 Mask Aligner. Introduction. The Karl Suss MA6 is a top and bottom side contact lithography printer used for fine line lithography down to 1 micron or better. It is capable of processing 4-inch substrate. After reading this . Karl Suss MJB-3 Mask Aligner User’s Manual The MA6 has upgraded optics designed to output in the mid-UV Service manuals, schematics, eproms for electrical technicians. Ma6 Service Manual - www.doorway.ru The Karl Suss MA6 is a top and bottom side mask aligner used for fine lithography down to 1 micron or below. 2. Karl Suss MA6 SOP Rev 11 - 10/07/ Page 2 of 11 Power on the Constant Intensity Controller (CIC) Check if the CP, CH1 or CH2 buttons on the CIC are illuminated “green”. If any one button is on then the lamp is on and you may proceed to step If the lamp is not on, proceed with step
Page | 1 KARL SUSS MA8 Mask Aligner Users Manual. Coral name: Suss MA8 Model: KARL SUSS MASK ALIGNER MA6/BA6 Location: Nanofab, Building , Room A Contact. The Karl Suss MA6 is a top and bottom side mask aligner used for fine lithography down to 1 micron or below. 2. W mercury arc lamp i-line (nm) with "smart power supply" is capable of operating in constant power mode, or constant intensity mode. The default is constant intensity mode. In this mode, the lamp deteriorates; the power is. Figure 5. Karl Suss Exposure Lamp power supply face showing control switches and readout. Tool Operation The following is a description of how to setup and operate the Karl Suss MA6/BA6 Contact Printer. These instructions are written in a step by step order to print a pattern onto a substrate. However there are many different procedures.
The purpose of this document is to detail the use of the Karl Suss MA Mask Aligner. Wafer Boats – The tool is loaded manually and boats are not used. Suss MJB3 Mask Aligner User Manual. Important Notes. 1. Don't turn off the lamp power. 2. Don't turn off the machine power (it will shut off the N2 to the. KARL SUSS MANUAL MASK ALIGNER MM: Manual Mask Aligner The Karl Suss MA M Manual Mask Aligner is a mask alignment and exposure system which offers.
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